Ivy Tech Community College MEMS 101 Introduction to Microsystems

Early Engineering
Written By justin seymour

This course will introduce Microelectromechanical Systems construction and their use in systems today. Experiments will be used throughout this course that introduces the methods used to construct MEMS devices with the various process steps.  Theories and practices associated with the construction and use of sensor, actuators and transducers will be discussed.  Process steps in the creation of MEMS devices will be discussed as well as the used of cleanrooms and cleanroom equipment and processes.

The link will take you to the main Ivy Tech MEMS page, which contains course materials for the following courses:

MEMS 101    Introduction to Microsystems

MEMS 102    Microsystems Characterization

MEMS 103    Microsystems and Electronics

justin seymour
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